发明名称 OPTICAL WAVEGUIDE
摘要 PROBLEM TO BE SOLVED: To provide an optical waveguide that can easily measure the deviation between a core pattern and an upper clad layer of the optical waveguide or the thickness of the core pattern and upper clad layer.SOLUTION: An optical waveguide 10 includes a lower clad layer 20, a core pattern 30 provided on the lower clad layer 20, and an upper clad layer 40, where the upper clad layer 40 further includes a core pattern marker 35 that is partially overlapped on an upper clad pattern 41 formed into a pattern and provided to partially protrude from the upper clad pattern 41.
申请公布号 JP2014219536(A) 申请公布日期 2014.11.20
申请号 JP20130098243 申请日期 2013.05.08
申请人 HITACHI CHEMICAL CO LTD 发明人 OGAWA TOMIO;SAKAI DAICHI;KURODA TOSHIHIRO
分类号 G02B6/122 主分类号 G02B6/122
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