| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a surface inspection method and a surface inspection apparatus that can inspect the defects of the surface of an inspection object without erroneous detection.SOLUTION: A surface inspection method for inspecting the surface of an inspection object 11 by imaging a reflection image of lattice stripes 13 whose striped patterns are obliquely projected on the surface of the inspection object 11 with a line CCD 15, comprises: an imaging step for imaging the oblique lattice stripes 13 projected on the surface of the inspection object 11; a phase difference calculation step for calculating the phase difference between the obtained photographed image and a standard pattern image; a separation step for separating an individual difference component of the inspection object 11 from a calculated phase difference image to obtain a corrected phase difference image; and a detection step for detecting the defects on the surface of the inspection object 11 on the basis of the corrected phase difference image.</p> |
