MEMS VARIABLE CAPACITOR WITH ENHANCED RF PERFORMANCE

摘要

In a MEMS device, the manner in which the membrane lands over the RF electrode can affect device performance. Bumps or stoppers placed over the RF electrode can be used to control the landing of the membrane and thus, the capacitance of the MEMS device. The shape and location of the bumps or stoppers can be tailored to ensure proper landing of the membrane, even when over-voltage is applied. Additionally, bumps or stoppers may be applied on the membrane itself to control the landing of the membrane on the roof or top electrode of the MEMS device.

主权项

1. A MEMS variable capacitor, comprising:
a substrate having one or more control electrodes and one or more RF electrodes disposed therein; a top electrode; and a membrane movable between the substrate and the top electrode, wherein one or more of the substrate and the membrane have bumps formed thereover to control the spacing between the membrane and either the top electrode or both the one or more control electrodes and one or more RF electrodes.