DEVICE SUBSTRATE, LIQUID EJECTION HEAD, AND METHOD FOR MANUFACTURING DEVICE SUBSTRATE AND LIQUID EJECTION HEAD

摘要

A device substrate includes a substrate body having an energy generating device provided thereon, where the energy generating device generates energy for ejecting liquid, an ejection port forming member disposed on the substrate body, where the ejection port forming member has a pressure chamber that surrounds the energy generating device and an ejection port that communicates with the pressure chamber, and a supply port configured to supply the liquid to the pressure chamber. The ejection port forming member has a first surface that is in contact with the substrate body and a second surface other than the first surface, and the supply port is formed in the second surface.

主权项

1. A device substrate comprising:
a substrate body having an energy generating device provided thereon, the energy generating device generating energy for ejecting liquid; an ejection port forming member disposed on the substrate body, the ejection port forming member having a pressure chamber that surrounds the energy generating device and at least one ejection port that communicates with the pressure chamber; and a supply port configured to supply the liquid to the pressure chamber, wherein the ejection port forming member has a first surface, which is in contact with the substrate body, and a second surface other than the first surface, and the supply port is formed in the second surface.