| 摘要 |
PROBLEM TO BE SOLVED: To provide a process of manufacturing a laminated substrate capable of avoiding substrate damage by heightening lamination strength even when laminating substrates whose coefficients of thermal expansion are largely different.SOLUTION: The process of manufacturing a laminated substrate includes the steps of: cleaning a handle substrate with a solution having a capacity of NHOH expressed in terms of a 29% water solution in reference to a capacity of HOexpressed in terms of a 30% water solution exceeding 1 and equal to or less than 200 in volume ratio; and laminating with a donor substrate. |
