| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface plate unit capable of making a sheet adhere onto a surface plate and an adhesion method for the sheet onto the surface plate.SOLUTION: A surface plate unit 30 includes: a surface plate 2 having an adhesion surface 4a that a sheet 11 adheres onto, a retaining surface which surrounds the adhesion surface 4a and sucks and retains an outer periphery of the sheet 11 above the adhesion surface 4a, a side face which extends from the retaining surface to the adhesion surface 4a, a first suction port 8 which is open in the retaining surface, a first suction path 10 which has one end linked to the first suction port 8 and the other end selectively connected to a suction source 14, a second suction port 16 which is open in at least one of the adhesion surface 4a and side face, and a second suction path 18 which has one end linked to the second suction port 16 and the other end selectively connected to the suction source 14; and a sealing mechanism 24 which includes a ceiling part 28 and a standing part 26 which abuts on the retaining surface and stands between the first suction port 8 and second suction port 16, the sealing mechanism 24 which is arranged on the sheet 11 mounted on the surface plate 2 so as to form a sealed space 25 over the sheet 11, and has a pressure reduction path 27. |
