发明名称 |
THERMO-COMPRESSION BONDING SYSTEM, SUBSYSTEMS, AND METHODS OF USE |
摘要 |
Co-planarity adjustment systems and methods, gantries capable of applying high force without imposing moment loads to their bearings, systems and methods for achieving rapid heating and cooling and efficient slidable seal systems capable of sealing a chamber and injecting one or more fluids into the chamber as well as actively recovering portions of such fluid which have migrated into the seal itself are disclosed in the context of thermo-compression bonding systems, apparatuses and methods, although many alternative uses will be apparent to those of skill in the art. |
申请公布号 |
WO2014186337(A1) |
申请公布日期 |
2014.11.20 |
申请号 |
WO2014US37800 |
申请日期 |
2014.05.13 |
申请人 |
MRSI SYSTEMS LLC |
发明人 |
CELIA, JR., NICHOLAS SAMUEL;DEVASIA, CYRIAC |
分类号 |
H01L21/603;H01L21/02 |
主分类号 |
H01L21/603 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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