| 发明名称 |
METROLOGICAL APPARATUS AND A METHOD OF DETERMINING A SURFACE CHARACTERISTIC OR CHARACTERISTICS |
| 摘要 |
A metrological apparatus has a surface data determiner to determine from measurement data a measured surface roughness data set (150) representing measured surface roughness and including any vibration induced measurement error and a harmonic model provider (120) providing a harmonic model representing vibration-induced surface characteristics of the surface as a set of harmonic components selected based on a surface form of the surface of the workpiece. A surface roughness determiner (140) uses the harmonic model and the measured surface roughness data to obtain a modified surface roughness data set in which vibration induced measurement error is suppressed. |
| 申请公布号 |
US2014343893(A1) |
申请公布日期 |
2014.11.20 |
| 申请号 |
US201214361417 |
申请日期 |
2012.11.28 |
| 申请人 |
Taylor Hobson Limited |
发明人 |
Mansfield Daniel |
| 分类号 |
G01B11/30;G01B11/24 |
主分类号 |
G01B11/30 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A metrological apparatus for determining a surface characteristic of a surface of a workpiece, the metrological apparatus comprising:
a surface data determiner to determine from measurement data a measured surface roughness data set representing measured surface roughness and including any vibration induced measurement error; a harmonic model provider providing a harmonic model representing vibration-induced surface characteristics of the surface as a set of harmonic components selected based on a surface form of the surface of the workpiece; a surface roughness determiner to use the harmonic model and the measured surface roughness data to obtain a modified surface roughness data set in which vibration induced measurement error is suppressed. |
| 地址 |
Leicester, Leicestershire GB |
