VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS DEVICE

摘要

An etalon is provided with a fixed substrate and a movable substrate opposed to the fixed substrate. The fixed substrate is provided with a first bonding surface to be bonded to the movable substrate via a bonding film and a first electrode surface on which a part of the first electrode is formed. The movable substrate is provided with a second bonding surface to be bonded to the first bonding surface via the bonding film and a second electrode surface on which a part of the second electrode is formed. In the state in which the fixed substrate and the movable substrate are bonded to each other with the bonding film, the first electrode formed on the first electrode surface and the second electrode formed on the second electrode surface have contact with each other.

主权项

1. A variable wavelength interference filter comprising:
a first substrate; a second substrate opposed to the first substrate; a first reflecting film provided to a surface of the first substrate, the surface being opposed to the second substrate; a second reflecting film provided to the second substrate and opposed to the first reflecting film via a predetermined gap; a first electrode provided to a surface of the first substrate, a first extraction electrode provided to a surface of the first substrate; a second electrode provided to the second substrate and opposed to the first electrode; and wherein a part of the first extraction electrode and a part of the second extraction electrode have contact with each other to thereby electrically be connected to each other.