VERTICAL CONDUCTIVE UNIT AND MANUFACTURING METHOD THEREOF

摘要

The invention provides a vertical conductive unit. The vertical conductive unit comprises an insulating layer comprising a connecting via, a first conductor, a second conductor, and a third conductor. The insulating layer comprises photosensitive polyimide, and the glass transition temperature of the photosensitive polyimide is lower than about 200° C. The invention also provides a method for manufacturing the vertical conductive unit.

主权项

1. A vertical conductive unit, which comprises:
an insulating layer comprising an upper surface and a lower surface, and the insulating layer comprising a connecting via running through the insulating layer; a first conductor contacting the lower surface of the insulating layer; a second conductor contacting the upper surface of the insulating layer; and a third conductor located in the connecting via and contacting the first conductor and the second conductor; wherein the insulating layer comprises photosensitive polyimide, and the glass transition temperature of the photosensitive polyimide is lower than about 200° C.