发明名称 MEMORY WITH CARBON-CONTAINING SILICON CHANNEL
摘要 A memory includes a first memory cell and a second memory cell formed over the first memory cell. Each of the first memory cell and the second memory cell includes a channel region comprising silicon and carbon, a control gate, and a dielectric stack between the channel region and the control gate. A carbon content of the channel region of the second memory cell is less than a carbon content of the channel region of the first memory cell.
申请公布号 US2014339572(A1) 申请公布日期 2014.11.20
申请号 US201414447884 申请日期 2014.07.31
申请人 MICRON TECHNOLOGY, INC. 发明人 Mouli Chandra
分类号 H01L27/115;H01L29/16;H01L29/78 主分类号 H01L27/115
代理机构 代理人
主权项 1. A memory, comprising: a first memory cell; and a second memory cell formed over the first memory cell; wherein each of the first memory cell and the second memory cell comprises: a channel region comprising silicon and carbon;a control gate; anda dielectric stack between the channel region and the control gate; wherein a carbon concentration of the channel region of the second memory cell is less than a carbon concentration of the channel region of the first memory cell.
地址 Boise ID US