发明名称 流動床反応器
摘要 Fluidized bed reactor systems for producing high purity silicon-coated particles are disclosed. A vessel has an outer wall, an insulation layer inwardly of the outer wall, at least one heater positioned inwardly of the insulation layer, a removable concentric liner inwardly of the heater, a central inlet nozzle, a plurality of fluidization nozzles, at least one cooling gas nozzle, and at least one product outlet. The system may include a removable concentric sleeve inwardly of the liner. In particular systems the central inlet nozzle is configured to produce a primary gas vertical plume centrally in the reactor chamber to minimize silicon deposition on reactor surfaces.
申请公布号 JP5627703(B2) 申请公布日期 2014.11.19
申请号 JP20120540006 申请日期 2010.11.17
申请人 发明人
分类号 C23C16/442;C23C16/24;H01L21/205 主分类号 C23C16/442
代理机构 代理人
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