| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozone supply device for supplying humidified ozone while suppressing the deactivation of hydroxyl radical by successfully mixing ozone and water in a gas phase. SOLUTION: The ozone supply device includes: a first supply unit 1 for supplying a first gas G1 that is a gas containing ozone; a second supply unit 2 for the supply of a second gas G2 that is a humidified gas; and a mixing vessel 3 connected with the first supply unit 1 and the second supply unit 2, and in which the first gas G1 and the second gas G2 are mixed by first to fourth filters 31 to 34 which are disposed within the vessel, and then from which the mixed gas is exhausted to the outside. COPYRIGHT: (C)2012,JPO&INPIT |
