| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of inspecting an article on the basis of an image having high resolving power and excellent in S/N characteristics. <P>SOLUTION: A first X-ray sensor 220a and a second X-ray sensor 220b are arranged horizontally to each other. The first X-ray sensor 220a has a detection part 223 constituted of a photodiode and containing, for example, Si (silicon). The detection part 223 mainly detects not only visible light but also X rays 210 and the second X-ray sensor 220b is constituted of a scintillator 221 and a photodiode 222. The scintillator 221 is equipped with a conversion layer 224 for converting the detected X rays 210 to light and the photodiode 222 is equipped with a detection part 225 containing Si in the same way as the first X-ray sensor 220a. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
