发明名称 |
WIDE RANGE PRESSURE CONTROL USING TURBO PUMP |
摘要 |
<p>The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressure and flow rate. A backing valve downstream of the pump is also controlled to maintain the setting of the throttle valve within a preferred, stable operating range.</p> |
申请公布号 |
EP1934043(B1) |
申请公布日期 |
2014.11.19 |
申请号 |
EP20060816029 |
申请日期 |
2006.09.29 |
申请人 |
EDWARDS VACUUM, INC. |
发明人 |
HOLLAND, PETER, JOHN;WILSON, KATE;STEPHENSON, DAWN |
分类号 |
B32B27/04;C23C16/00 |
主分类号 |
B32B27/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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