MULTILAYER PIEZOELECTRIC ELEMENT AND EJECTOR USING THIS

摘要

A multilayer piezoelectric element formed by laying a plurality of piezoelectric layers and metal layers alternately, wherein the plurality of metal layers include a plurality of low-fill metal layers having a fill factor of a metal composing the metal layers lower than that of adjacent, opposite-sides metal layers in the layer direction. In a multilayer piezoelectric element where a plurality of piezoelectric layers and metal layers are laid in layers alternately, the plurality of metal layers include a plurality of thin metal layers having a thickness smaller than that of adjacent, opposite-sides metal layers in the layer direction. In a multilayer piezoelectric element where a plurality of piezoelectric layers and metal layers principally containing an alloy are laid in layers alternately, the plurality of metal layers include a plurality of metal layers having a ratio of one component of the alloy higher than that of adjacent, opposite-sides metal layers in the layer direction.