| 摘要 |
The present invention relates to a deposition source transferring device capable of preventing particle generation, an electromagnet mask chuck transferring device, and a precise alignment device for a substrate and a mask used for a downward type OLED deposition apparatus. According to the present invention in an upper part of a chamber, a downward type linear deposition source is linearly transferred by an electromagnet coil and a permanent magnet motor; an organic material is evaporated while the deposition source is transferred; and an organic thin film is formed downward on the substrate. In order to manufacture the organic thin film on which a micro RGB pattern is formed, the substrate is seated on a substrate groove; and a mask holder holding a mask frame, a substrate table, a magnet array chuck, and an up-down pin array device are arranged. The electromagnet mask chuck is transferred to a mask area to prevent the mask from being sagged. Therefore, the substrate and the mask can be precisely aligned. A pattern of the organic thin film can be formed on a substrate in a large size without making the substrate sag; thus, increasing the productivity of an OLED TV. |
