| 摘要 |
PROBLEM TO BE SOLVED: To provide a reflective film composed of an Ag-based alloy, which never causes a whitened portion or roughing of the whitened portion while having high reflectivity even when a defect is present in the film, and to provide a sputtering target material or a vapor deposition material for forming the same. SOLUTION: The reflective film is composed of an Ag-based alloy including 0.005-1.0 mass% of P, 0.01-5.0 mass% of Cu, >0.9 mass% and≤5.0 mass% of Au, and the balance Ag and inevitable impurities. COPYRIGHT: (C)2012,JPO&INPIT |
