| 摘要 |
A bolt fastening system for a turbomolecular pump wherein a first member is fastened in an axial direction with respect to a second member by multiple bolts arranged concentrically with respect to a rotor shaft center. The bolt-fastening system equipped with multiple pairs of non-penetrating pinholes arranged concentrically with respect to a rotor shaft center and formed opposing one another in respective opposing faces of the fastened first and second members, and equipped with pins provided for each pair of pinholes and inserted into the pairs of pinholes. When the size of a gap between a bolt and a bolt hole formed in the first member is Db, and a sizes of the gaps between the pins and the pinholes formed in the first and second members are Dp1 and Dp2, the gap sizes Db, Dp1, and Dp2 satisfy the equation Db>=(Dp1+Dp2). |
