| 摘要 |
PROBLEM TO BE SOLVED: To efficiently and highly accurately correct deterioration of focusing performance due to an arrangement error among a plurality of optical elements. SOLUTION: An optical adjustment device includes: a decentering sensitivity measuring section 3 that, when a correction necessity determination section 2 determines that it is required to correct an arrangement error, decentering sensitivity of an optical element 11 subject to correction in a plurality of optical elements; and a driving amount calculating section 4 that calculates a driving amount for decentering the optical element 11 subject to the correction in a translation direction and a tilt angle direction based on a wavefront aberration extracted by a wavefront aberration extracting section 1 and the decentering sensitivity measured by the decentering sensitivity measuring section 3. The optical element driving section 5 decenters the optical element 11 subject to the correction by the driving amount calculated by the driving amount calculating section 4 in the translation direction and the tilt angle direction. COPYRIGHT: (C)2012,JPO&INPIT |
