发明名称 複合酸化物焼結体、複合酸化物焼結体の製造方法、スパッタリングターゲット及び薄膜の製造方法
摘要 <p>A sintered complex oxide comprising metal oxide particles (a) having a hexagonal lamellar structure and containing zinc oxide and indium, and metal oxide particles (b) having a spinel structure and containing a metal element M (where M is aluminum and/or gallium), wherein the mean value of the long diameter of the metal oxide particles (a) is no greater than 10 µm, and at least 20% of the metal oxide particles (a) have an aspect ratio (long diameter/short diameter) of 2 or greater, based on the number of particles.</p>
申请公布号 JP5625907(B2) 申请公布日期 2014.11.19
申请号 JP20100520870 申请日期 2009.07.14
申请人 发明人
分类号 C04B35/453;C23C14/34;H01B1/08 主分类号 C04B35/453
代理机构 代理人
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