| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor generator which can generate solvent steam efficiently while controlling the breakdown of a container being a tank. SOLUTION: In this steam generator 37, the tank 71 is supported from below by a supporting member 75 which has a flange 75a, the first recess 75b, and the first O ring 76. Therefore, the supporting function of the tank 71 can be maintained without a bonded seal being broken by thermal stress caused by heat from a conventional heating means. Moreover, since the tank 71 is supported from the side by the supporting member 75, the second recess 75c created at the side of the supporting member 75, and the second O ring 77, thermal deformation under the side of the tank 71 can be coped with by the second O ring 77. Furthermore, since a heat conductive sponge 84 is provided between the top of an upper aluminum plate 81 and the tank 71, the warp of the bottom of the tank 71 and the warp of a heater 41 can be coped with. COPYRIGHT: (C)2012,JPO&INPIT |
