| 摘要 |
PROBLEM TO BE SOLVED: To provide a multilayer tube for super pure water piping capable of suppressing permeation of gas from the outside of the multilayer tube and suppressing multilayer tube constituent or the like from eluting to the super pure water circulating in the multilayer tube. SOLUTION: The multilayer tube for super pure water piping is made of fluorine resin, and comprises: a first resin layer contacting the super pure water; and a second resin layer made of a gas impermeable resin and provided on the outer peripheral surface of the first resin layer. This suppresses permeation of the gas from the outside and also suppress the multilayer tube constituent or the like from eluting to the super pure water circulating in the multilayer tube. COPYRIGHT: (C)2011,JPO&INPIT |
