| 摘要 |
A pattern forming method for forming a fine pattern, said pattern forming method comprising: a first step for changing into a lyophilic nature a first pattern formation region, wherein a first pattern is to be formed, in a liquid-repellent first film having a lyophilic-lyophobic conversion function, said liquid-repellent first film being formed on a substrate, to reduce the film thickness; a second step for forming a second film having a flat surface on the first film; and a third step for drying the second film and thus forming the first pattern in the first pattern formation region. |
