| 摘要 |
<p>A substrate processing apparatus for processing a substrate comprising units for carrying out steps for processing the substrate; ON/OFF switching devices, corresponding to the respective units, switching between an ON state in which electric power is supplied to a corresponding unit and an OFF state in which supply of electric power for the unit is halted; and a control device for acquiring a production information including processing details and an end time limit for a substrate to be introduced into the substrate processing apparatus, preparing a time chart representing an operation scheme for the units based on the production information in a manner such that all of the steps carried out according to the processing details by the units are to be completed by the end time limit, and making the units operate according to the time chart while controlling the ON/OFF switching device according to the time chart.</p> |
