| 摘要 |
PROBLEM TO BE SOLVED: To suppress deterioration of an electronic element formed on a substrate when plural reform regions are formed in intersecting directions in the substrate by using a laser beam. SOLUTION: In a reform region forming step of applying a laser beam 64 from a substrate back surface 11b side of a wafer-like substrate 11 to an element group formed substrate 20 having a laminate semiconductor layer 12 constituting plural semiconductor light emitting elements 21 formed on a substrate surface 11a of the wafer-like substrate 11 to form, in the substrate, a first reform region L1 and a third reform region L3 extending in a y-direction along the surface of the substrate 11 and a second reform region L2 and a fourth reform region L4 extending in an x-direction which is along the surface of the substrate 11 and different from the y-direction, the first reform region L1, the second reform region L2, the third reform region L3 and the fourth reform region L4 are successively formed from a nearer side to a farther side with respect to the substrate surface 11a of the substrate 11 (from a farther side to a nearer side with respect to the substrate back surface 11b) in this order. COPYRIGHT: (C)2012,JPO&INPIT |
