| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter removal apparatus whose structure can be simplified. SOLUTION: A ventilation hole 14 formed on a container body 10 mounting a workpiece 40 has a smaller sum total of the passage cross-sectional area than a passage cross-sectional area of an exhaust passage 31, and along with the suction of air in an internal space 50 by a suction blower 20, the air flowing in the internal space 50 through the ventilation hole 14 is blasted on the outer peripheral surface 44 of the workpiece 40 as a high-speed flow to thereby remove foreign matters. COPYRIGHT: (C)2012,JPO&INPIT |
