| 摘要 |
PROBLEM TO BE SOLVED: To improve an operation rate of an apparatus by shortening the operation stop time of the apparatus due to maintenance work. SOLUTION: A vacuum chamber 1 has a plurality of connectors which can be electrically connected to a high frequency power source, and an array antenna unit 30 having a plurality of electrode bars which can be connected to the connectors provided therein. An antenna transport chamber 200 can be connected to the vacuum chamber 1 through a gate valve 201 while keeping the inside in a vacuum state. The array antenna unit 30 is carried out to the antenna transport chamber 200 from the vacuum chamber 1 by being held by an antenna transport body 70A, and a new array antenna unit 30 held by an antenna transport body 70B is carried in the vacuum chamber 1 from the antenna transport chamber 200. COPYRIGHT: (C)2012,JPO&INPIT |
