| 摘要 |
PROBLEM TO BE SOLVED: To provide a resistance measuring device and a resistance measuring method for accurately detecting resistance along a vertical direction to a surface of a resistance detection body. SOLUTION: A resistance measuring device 1 comprises: first current applying means 5 for applying a first current to first portions where resistance along a vertical direction to a surface of a resistance detection body 2 is to be measured; second current applying means 6 for applying a second current to second portions each set to surround the first portion and closer to an outer periphery than the first portion so as to make a potential difference between the first portions and the second portions along an in-plane direction of the resistance detection body 2 substantially zero; and first voltage detecting means 7 for detecting a first voltage obtained between the first portions in applying the first current and the second current. COPYRIGHT: (C)2012,JPO&INPIT |
