| 摘要 |
A complex inspection device provided with an optical image pickup unit (300) which faces a portion to be inspected between an X-ray camera (50) and an X-ray irradiation unit (160), wherein a magnification change means (155) for changing the magnification of an X-ray image by relatively displacing the X-ray irradiation unit (160) and the X-ray camera (50) between a close-up position and a non-close-up position is provided. In the magnification change means (155), the arrival rute of an X-ray that arrives at the X-ray camera (50) from the X-ray irradiation unit (160) is shortened for close-up in the close-up position. In the non-close-up position, the arrival rute is longer than that in the close-up position. When the X-ray irradiation unit and/or the X-ray camera needs to move toward the close-up position, the optical pickup unit (300) is withdrawn in advance so that the X-ray irradiation unit and the X-ray camera relatively can move toward the close-up position. |
