| 摘要 |
The method involves starting a movement of a carrier element (11) i.e. sample desk, by actuating a stepping motor with a motor current i.e. alternate current. The motor current is adjusted to preset frequency and preset amplitude. The movement of the carrier element is decelerated by reducing the frequency and the amplitude of the motor current, where the frequency is reduced to zero in a predetermined period, and the amplitude is reduced to amplitude of a predetermined holding current in the predetermined period. Independent claims are also included for the following: (1) a particle beam apparatus (2) a computer program product comprising instructions for performing a method for setting a position of a carrier element. |
