发明名称 半導体装置および半導体装置の製造方法
摘要 <p>A semiconductor apparatus invention includes a substrate (1), an epitaxial layer (2) formed on the substrate (1), agate electrode (3), a source electrode (4), and a drain electrode (5) that are formed on the epitaxial layer. The source electrode (4) and the drain electrode (5) each include at least two first divided electrodes that are formed to extend in parallel to each other in a first direction, inter-electrode distances Ps and Pd between the first divided electrodes are greater than or equal to a radius of an abnormal growth portion formed on a surface of the epitaxial layer (2), and widths of the first divided electrodes are less than or equal to the radius of the abnormal growth portion.</p>
申请公布号 JP5628416(B2) 申请公布日期 2014.11.19
申请号 JP20130511901 申请日期 2012.04.06
申请人 发明人
分类号 H01L21/338;H01L21/28;H01L29/41;H01L29/778;H01L29/812 主分类号 H01L21/338
代理机构 代理人
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