Liquid droplet ejection apparatus, method for manufacturing electro-optical apparatus, electro-optical apparatus, and electronic apparatus

摘要

A liquid droplet ejection apparatus includes a writing device, a weight measuring device disposed adjacent to the writing device, and a controlling device. The writing device performs writing on a workpiece by ejecting functional liquid from at least one ink jet functional liquid droplet ejection head while moving the functional liquid droplet ejection head relative to the workpiece. The weight measuring device measures an amount of ejected droplets from a weight of the functional liquid ejected from the functional liquid droplet ejection head. The controlling device controls a driving power for the functional liquid droplet ejection head on the basis of a measurement result input from the weight measuring device.

主权项

1. A method for manufacturing an electro-optical apparatus using a liquid droplet ejection apparatus wherein the liquid droplet ejection apparatus includes:
a first ink jet head that ejects a first functional liquid; a second ink jet head that ejects a second functional liquid; and a weight measuring device that measures a weight of the first functional liquid ejected from the first ink jet head, wherein the weight measuring device includes:
a container;an electronic balance; anda flushing box, the method comprising: measuring a weight of the first functional liquid ejected from the first ink jet head by the weight measuring device; controlling a driving power for the first ink jet head on the basis of a measurement result of the weight measuring device; and ejecting the first functional liquid from the first ink jet head to a substrate after the driving power for the first ink jet head is controlled on the basis of the measurement result, the step of measuring the weight of the first functional liquid ejected from the first ink jet head including:
performing a measurement ejection that ejecting the first functional liquid from the first ink jet head to the container;ejecting the second functional liquid from the second ink jet head to the flushing box during at least a portion of the measurement ejection;measuring a weight of the first functional liquid ejected in the container with the electronic balance.