摘要 |
<p>An actuator comprises a cavity containing a working medium that reversibly expands as it undergoes a phase change from a solid to a liquid state, a diaphragm disposed adjacent the cavity such that expansion and contraction of the expandable working medium causes the diaphragm to deflect, and a semiconductor element disposed in the cavity, wherein the semiconductor element is adapted to heat the working medium to cause it to undergo the phase change into the liquid state. The actuator may be used in a pump for an infusion system.</p> |