发明名称 |
Shack-Hartmann sensor and wavefront measuring method utilizing the same |
摘要 |
A wavefront measuring method using a Shack-Hartmann sensor includes the steps of provisionally determining one of a plurality of light receiving elements as a center-of-gravity position in a spot having a light intensity distribution of light condensed on the light receiving element, calculating a distance between the provisionally determined center-of-gravity position and an adjacent center-of-gravity position, setting an area smaller than and inside of a spot that partially overlaps another spot, and setting a spot that does not overlap another spot to the area, calculating a center-of-gravity position for each area, and calculating the wavefront based upon a shift amount between an ideal center-of-gravity position when parallel light enters the micro lens array and the center-of-gravity position of each area. |
申请公布号 |
US8891077(B2) |
申请公布日期 |
2014.11.18 |
申请号 |
US201313963220 |
申请日期 |
2013.08.09 |
申请人 |
Canon Kabushiki Kaisha |
发明人 |
Takaie Yuuichi |
分类号 |
G01J9/00 |
主分类号 |
G01J9/00 |
代理机构 |
Rossi,Kimms & McDowell LLP |
代理人 |
Rossi,Kimms & McDowell LLP |
主权项 |
1. A wavefront measuring method of measuring a wavefront of a target optical system using a Shack-Hartmann sensor having a micro lens array and a plurality of light receiving elements, the micro lens array having a two-dimensional arrangement and including a plurality of micro lenses configured to condense light that has passed the target optical system upon the light receiving elements, the wavefront measuring method being performed by a processor and comprising the steps of:
provisionally determining one of the plurality of light receiving elements as a center-of-gravity position in a spot having a light intensity distribution of light condensed on the light receiving element; calculating a distance between the provisionally determined center-of-gravity position and an adjacent center-of-gravity position; setting an area smaller than and inside of a spot that partially overlaps another spot, and setting a spot that does not overlap another spot to the area; calculating a center-of-gravity position for each area; and calculating the wavefront based upon a shift amount between an ideal center-of-gravity position when parallel light enters the micro lens array and the center-of-gravity position of each area. |
地址 |
JP |