| 摘要 |
<p>The present invention relates to a mask for manufacturing an OLED mask and a method thereof. More particularly, the present invention relates to a mask for manufacturing an OLED mask to provide high corrosion resistance to a mask, and a method thereof. A mask for manufacturing an OLED mask according to an embodiment of the present invention, in a mask used for a plasma enhanced chemical vapor deposition (PECVD) process for manufacturing an OLED, includes a metal mask made of a material which has a thermal expansivity similar to a glass substrate; and etch barrier layer which is deposited on the surface of the metal mask and has corrosion resistance against a F-based cleaning agent.</p> |
