Semiconductor device and microphone

摘要

A package is formed by vertically stacking a cover and a substrate. A microphone chip is mounted at the top surface of a concave portion provided to the cover, and a circuit element is mounted on the upper surface of the substrate. The microphone chip is connected to a pad on the lower surface of the cover by a bonding wire. The circuit element is connected to a pad on the upper surface of the substrate by a bonding wire. A cover-side joining portion in conduction with the pad on the lower surface of the cover, and a substrate-side joining portion in conduction with the pad on the upper surface of the substrate, are joined by a conductive material. A conductive layer for electromagnetic shielding is embedded inside the cover near the bonding pad and the cover-side joining portion.

主权项

1. A semiconductor device comprising:
a package formed from a first member and a second member, wherein a concave portion is formed on an inner surface of at least one member of the first member and the second member; a sensor mounted on an inner surface of the first member; a circuit element mounted on an inner surface of the second member; and electrical connection means configured to electrically connect the sensor and the circuit element through a joining portion of the first member and the second member, wherein the at least one member of the first member and the second member comprising the concave portion, is configured by adhering together a main member and an auxiliary member, the main member includes a concave part, and a conductive layer for electromagnetic shielding on a surface for adhering to the auxiliary member, the auxiliary member includes an opening, and is adhered to the main member by being stacked on the conductive layer for electromagnetic shielding, and the concave portion is formed from the concave part and the opening, and the conductive layer for electromagnetic shielding is provided near a part of the joining portion of the first member and the second member through which the electrical connection means is passed.