| 摘要 |
A cyclic compound represented by formula (1):;
wherein L, R1, R′, and m are as defined in the specification. The cyclic compound of formula (1) is highly soluble to a safety solvent, highly sensitive, and capable of forming resist patterns with good profile. Therefore, the cyclic compound is useful as a component of a radiation-sensitive composition. |
| 主权项 |
1. A cyclic compound represented by formula (1): wherein each L is independently a single bond or a divalent organic group selected from the group consisting of a linear or branched alkylene group having 1 to 20 carbon atoms, a cycloalkylene group having 3 to 20 carbon atoms, an arylene group having 6 to 24 carbon atoms, —O—, —OC(═O)—, —OC(═O)—O—, —N(R5)—C(═O)— wherein R5 is hydrogen or an alkyl group having 1 to 10 carbon atoms, —N(R5)—C(═O)O— wherein R5 is as defined above, —S—, —SO—, —SO2—, and a combination of any of preceding groups; each R1 is independently an alkyl group having 1 to 20 carbon atoms, a cycloalkyl group having 3 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms, an alkoxyl group having 1 to 20 carbon atoms, cyano group, nitro group, hydroxyl group, a heterocyclic group, a halogen, carboxyl group, glycidyl group, an alkylsilyl group having 1 to 20 carbon atoms, or hydrogen atom, with the proviso that at least one of R1 is glycidyl group and another at least one of R1 is hydrogen atom; each R′ is independently an aryl group represented by the following formula:wherein R4 is a cycloalkyl group having 3 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms, an alkoxy group having 1 to 20 carbon atoms, cyano group, nitro group, a heterocyclic group, carboxyl group, hydroxyl group, glycidyl group, or an alkylsilyl group having 1 to 20 carbon atoms, and p is an integer of 1 to 5; and
each m is an integer of 1 to 4. |
