Conversion structure, image sensor assembly and method for fabricating conversion structure

摘要

An electromagnetic wave conversion structure consists of a substrate, a plurality of electromagnetic wave conversion units forming a two-dimensional array, a reflective film and a plurality of reflective layers. The substrate has a first surface and a second surface disposed opposite to the first surface. The second surface consists of a plurality of trenches formed in the body of the substrate. Each electromagnetic wave conversion units is disposed in each trench, is used to absorb first electromagnetic waves with a first wavelength and is used to emit second electromagnetic waves with a second wavelength. The first wavelength is shorter than the second wavelength. The reflective film covers the first surface of the substrate and is used to reflect the second electromagnetic wave. Each of the reflective layers is disposed on the sidewall of each trench of the corresponding electromagnetic wave conversion unit.

主权项

1. A conversion structure, comprising:
a substrate, having a first surface and a second surface opposite to the first surface, wherein the second surface of the substrate having a plurality of trenches penetrating the substrate; a plurality of electromagnetic wave conversion elements, respectively disposed in each of the trenches, wherein each of the electromagnetic wave conversion elements is used to absorb a first electromagnetic wave having a first electromagnetic wave wavelength and to emit a second electromagnetic wave having a second electromagnetic wave wavelength, and the first electromagnetic wave wavelength is shorter than the second electromagnetic wave wavelength; a reflective film, covering the first surface of the substrate, wherein the first electromagnetic wave penetrates the reflective film, and the reflective film is used to reflect the second electromagnetic wave; and a plurality of reflective layers, respectively disposed between a sidewall of each of the trenches and each of the electromagnetic wave conversion elements, wherein the reflective layers are used to reflect the second electromagnetic wave.