Imprint system, imprint method, and non-transitory computer storage medium

摘要

The present invention is an imprint system including an imprint unit transferring a transfer pattern to a coating film formed on a substrate using a template having the transfer pattern formed on a front surface thereof to form a predetermined pattern in the coating film, the imprint system including: a substrate carry-in/out station connected to the imprint unit, capable of keeping a plurality of the substrates, and carrying the substrate into/out of the imprint unit side; and a template carry-in/out station connected to the imprint unit, capable of keeping a plurality of the templates, and carrying the template into/out of the imprint unit side at a predetermined timing.

主权项

1. An imprint system comprising an imprint unit transferring a transfer pattern to a coating film formed on a substrate using a template having the transfer pattern formed on a front surface thereof to form a predetermined pattern in the coating film, said imprint system comprising:
a substrate carry-in/out station connected to said imprint unit, capable of keeping a plurality of the substrates, and carrying the substrate into/out of a side of said imprint unit-side; and a template carry-in/out station connected to said imprint unit, capable of keeping a plurality of the templates, and carrying the template into/out of the side of said imprint unit at a predetermined timing, wherein a template cleaning block cleaning a front surface of a template carried out of said imprint unit is disposed between said imprint unit and said template carry-in/out station, wherein said template cleaning block has an ultraviolet irradiation part irradiating the front surface of the template with ultraviolet light, wherein said template cleaning block has a cleaning solution supply part that is movable toward the template, and the cleaning solution supply part that is moved toward the template supplies a cleaning solution to the front surface of the template supplies a cleaning solution to the front surface of the template and said template cleaning block includes a casing enclosing both the ultraviolet irradiation part and cleaning solution supply part, wherein said imprint system includes a plurality of stations disposed in a straight line extending from the template carry-in/out station on a first end of said straight line to the substrate carry-in/out station on a second end of said straight line, wherein said template cleaning block and said imprint unit are located in said straight line between the template carry-in/out station and the substrate carry-in/out station.