Piezoelectric actuator having a moveable electrode portion

摘要

A piezoelectric actuator that includes a fixed electrode in a base substrate, a dielectric layer on the surface of the base substrate, a lower electrode that is at least partially separated from the base substrate, a piezoelectric layer on the surface of the lower electrode, and an upper electrode on the side of the surface of the piezoelectric layer. At least a portion of the upper electrode or the lower electrode serves as a movable electrode, which can be moved by distortion of the piezoelectric layer caused by application of a piezoelectric drive voltage.

主权项

1. A piezoelectric actuator comprising:
a base substrate that has an insulating property; a fixed electrode adjacent the base substrate; a first electrode at least partially separated from the base substrate; a piezoelectric layer adjacent a side of the first electrode opposite to the base substrate; and a second electrode on a side of the piezoelectric layer opposite to the first electrode, wherein only a portion of one of the first or second electrode defines a movable electrode portion whose distance to the fixed electrode varies as the piezoelectric layer is distorted by application of a piezoelectric drive voltage to the first electrode or second electrode.