SUPPORTING DEVICE FOR DIVIDED WINDOW PLATES OF CHAMBER FOR HEAT TREATMENT OF SUBSTRATES, AND CHAMBER FOR HEAT TREATMENT OF SUBSTRATES AND HEAT TREATMENT APPARATUS OF SUBSTRATE HAVING THE SAME

摘要

Disclosed are a divided window plate support device of a chamber for the heat treatment of a substrate, a chamber for the heat treatment of a substrate, and a heat treatment device for a substrate having the same. The support device for supporting divided upper and lower window plates of a chamber for the heat treatment of a substrate comprises an upper support device for supporting the upper window plate; and a lower support device for supporting the lower support device. The upper and lower support devices are extended across upper and lower housings inside the chamber for the heat treatment of a substrate in the direction, which is vertical to the loading direction of the substrate, respectively, wherein the upper and lower housings form the chamber for the heat treatment of a substrate.