发明名称 |
Formulations comprising a mixture of ZnO cubanes and process using them to produce semiconductive ZnO layers |
摘要 |
The present invention relates to formulations comprising a) at least two different ZnO cubanes of which at least one ZnO cubane is present in solid form under SATP conditions and at least one ZnO cubane is present in liquid form under SATP conditions, and b) at least one solvent, to processes for producing semiconductive ZnO layers from these formulations, to the use of the formulations for producing electronic components and to the electronic components themselves. |
申请公布号 |
US8889476(B2) |
申请公布日期 |
2014.11.18 |
申请号 |
US200913123072 |
申请日期 |
2009.11.04 |
申请人 |
Evonik Degussa GmbH |
发明人 |
Thiem Heiko;Steiger Juergen;Merkulov Alexey;Pham Duy Vu;Aksu Yilmaz;Schutte Stefan;Driess Matthias |
分类号 |
H01L21/36;C23C18/12 |
主分类号 |
H01L21/36 |
代理机构 |
Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P. |
代理人 |
Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P. |
主权项 |
1. A formulation comprising
a) at least two different ZnO cubanes of which i) at least one ZnO cubane is present in solid form under SATP conditions and ii) at least one ZnO cubane is present in liquid form under SATP conditions, and b) at least one solvent. |
地址 |
Essen DE |