发明名称 STICKING APPARATUS AND STICKING METHOD
摘要 <p>A sticking apparatus (100) includes a pair of plate members (1) between which a laminate (20) is formed, and a support member (5) which supports the plate member (1). The support member (5) which supports at least one plate member (1) is located on multiple points or lines which are adjacent to each other with a constant distance on the plate member (1).</p>
申请公布号 KR20140132679(A) 申请公布日期 2014.11.18
申请号 KR20140053072 申请日期 2014.05.01
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 NAKAMURA AKIHIKO;INAO YOSHIHIRO;KATO SHIGERU
分类号 H01L23/12;H01L23/58 主分类号 H01L23/12
代理机构 代理人
主权项
地址