Manipulator auto-teach and position correction system

摘要

A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first processing device reference point in a known relationship with the at least one target, at least one transmitter located within the housing and configured to transmit an identification signal identifying the at least one transmitter to the at least one target and a controller operably connected to the at least one target and the at least one transmitter, the controller being configured to receive data signals, based on the identification signal, from one of the at least one target and the at least one transmitter and control an operational characteristic of the processing device, based on the data signals.

主权项

1. A substrate processing system comprising:
a housing comprising a first housing module configured to hold an isolated atmosphere therein and closable openings configured for communicably connecting the first housing module to a second housing module having a substrate holding station and a substrate holding station reference point associated therewith; a transport apparatus partly within the first housing module and configured to transport a substrate; at least one target; at least one transmitter configured to transmit an identification signal to the at least one target; and a controller operably connected to the transport apparatus, the at least one target and the at least one transmitter, the controller being configured to receive data signals, based on the identification signal, from one of the at least one target and the at least one transmitter and effect transfer of the substrate with the transport apparatus from the first housing module to the substrate holding station of the second housing module through the closeable opening, based on the data signals.