| 发明名称 | Method for manufacturing solar cell | ||
| 摘要 | A method for manufacturing a solar cell includes performing a dry etching process to form a textured surface including a plurality of minute protrusions on a first surface of a semiconductor substrate, performing a first cleansing process for removing damaged portions of surfaces of the minute protrusions using a basic chemical and removing impurities adsorbed on the surfaces of the minute protrusions, performing a second cleansing process for removing impurities remaining or again adsorbed on the surfaces of the minute protrusions using an acid chemical after performing the first cleansing process, and forming an emitter region at the first surface of the semiconductor substrate. | ||
| 申请公布号 | US8889464(B2) | 申请公布日期 | 2014.11.18 |
| 申请号 | US201313890931 | 申请日期 | 2013.05.09 |
| 申请人 | LG Electronics Inc. | 发明人 | Yi Mann;Kwon Jeonghyo;Lee Seongeun;Kwon Taeyoung |
| 分类号 | H01L21/00;H01L31/0232;H01L31/0236;H01L21/02;H01L31/0216;H01L31/068 | 主分类号 | H01L21/00 |
| 代理机构 | Birch, Stewart, Kolasch & Birch, LLP | 代理人 | Birch, Stewart, Kolasch & Birch, LLP |
| 主权项 | 1. A method for manufacturing a solar cell, the method comprising: performing a dry etching process to form a textured surface including a plurality of minute protrusions on a first surface of a semiconductor substrate; performing a first cleansing process for removing damaged portions of surfaces of the minute protrusions using a first chemical and removing impurities adsorbed on the surfaces of the minute protrusions, the first chemical consisting of a basic chemical; performing a second cleansing process for removing impurities remaining or again adsorbed on the surfaces of the minute protrusions using a second chemical after performing the first cleansing process, the second chemical consisting of an acid chemical; and forming an emitter region at the first surface of the semiconductor substrate. | ||
| 地址 | Seoul KR | ||