Nozzle, substrate processing apparatus, and substrate processing method

摘要

A nozzle for discharging droplets of a processing liquid for processing a substrate has a main body including a supply port, a drain port, a processing liquid flow passageway connecting the supply port and the drain port, and a plurality of discharge ports from which the processing liquid is discharged. The processing liquid flow passageway includes a plurality of branch flow channels, which branch out between the supply port and the drain port and collect together between the supply port and the drain port. The plurality of discharge ports form a plurality of columns respectively corresponding to the plurality of branch flow channels; and are aligned along and connected to the corresponding branch flow channels. A piezo element applies vibration to the processing liquid flowing through the plurality of branch flow channels.

主权项

1. A substrate processing method comprising:
a step of supplying a processing liquid to a supply port of a nozzle, having a main body in which the supply port is formed and a piezo element, in a state where the nozzle faces a major surface of a substrate; and a step of applying voltage to the piezo element of the nozzle in parallel to the step of supplying the processing liquid; wherein the nozzle is arranged to discharge droplets of the processing liquid toward the substrate, the main body includes: the supply port supplied with the processing liquid; a drain port from which the processing liquid supplied to the supply port is drained; a processing liquid flow passageway connecting the supply port and the drain port, the processing liquid flow passageway including a plurality of branch flow channels branching out between the supply port and the drain port and collecting together between the supply port and the drain port; and a plurality of discharge ports forming a plurality of columns respectively corresponding to the plurality of branch flow channels, being aligned along the corresponding branch flow channels, and being connected to the corresponding branch flow channels; and the piezo element is arranged to apply vibration to the processing liquid flowing through the plurality of branch flow channels.