Vapor collection

摘要

An apparatus for collecting condensed vapor during physical vapor deposition includes an enclosure configured to be placed adjacent to one or more vapor sources in a vacuum chamber. The enclosure includes an internal surface of the enclosure partially enclosing a volume of space configured to receive an object wherein the enclosure is maintained at a cooler temperature than the one or more vapor sources. The internal surface of the enclosure is coupled to one or more drainage gutters drainage drainage gutters.

主权项

1. An apparatus for collecting condensed vapor during physical vapor deposition comprising:
a vacuum chamber; at least two vapor sources; and an enclosure inside the vacuum chamber in a vertical position maintained at a temperature cooler than the at least two vapor sources, the at least two vapor sources being in a vertical position, the enclosure comprising:
an internal surface partially enclosing a volume of space, the space configured to receive an object, wherein the object is a disc; andone or more drainage gutters coupled to the internal surface of the enclosure, wherein the at least two vapor sources are positioned adjacent opposite sides of the enclosure.