Micromechanical system and method for building a micromechanical system

摘要

A micromechanical system with a system that can vibrate, has a seismic mass and at least two spring elements. The spring elements are respectively fastened on one side externally to the seismic mass and on the other side to fixed anchor points of the micromechanical system such that the seismic mass can vibrate in a movement direction. In order to obtain a particularly large frequency spacing between the useful mode and further vibration modes of the system, at least one further spring element is provided in the inner region of the seismic mass. The further spring element the is fastened to a further anchor point of the micromechanical system. A method builds a micromechanical system with a system that can vibrate.

主权项

1. A micromechanical system, comprising:
a seismic mass having an inner region surrounded by an external region; and a plurality of spring elements supporting the seismic mass so that the seismic mass can vibrate, the spring elements comprising:
at least two outer spring elements, each having first and second sides with the first side being fastened to an external side of the seismic mass and the second side being fastened to a fixed anchor point of the micromechanical system; andan inner spring element having first and second sides with the first side being fastened to the inner region of the seismic mass and the second side fastened to an inner anchor point of the micromechanical system, the inner spring element being fastened to a point on the inner region of the seismic mass that has a vibration amplitude perpendicular to a movement direction of the seismic mass.