| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer system and a substrate transfer method capable of suppressing occurrence of scratches on the back surface of the substrate due to rotation thereof on a substrate plate, in the transfer of a substrate by means of a boat-type sample holder.SOLUTION: A substrate transfer system includes a substrate plate having a substrate mounting surface, in which a substrate mounting region for mounting a substrate is defined, and stretching in the vertical direction, and a transfer device for transferring a substrate on the substrate plate by changing the distance of the substrate and the substrate mounting surface, between a position where the back surface comes into contact with the substrate mounting region and a position separated therefrom, while rotating the substrate in a state where the back surface of the substrate faces the substrate mounting surface in parallel with the back surface of the substrate. |
